Development of self-calibration techniques for on-wafer and fixtured measurements: a novel approach

摘要

Network Analyzer self-calibration techniques - TRL, LMR, TAR- are developed, implemented and compared in several transmission media. A novel LMR (Line-Match-Reflect) technique based on known LINE and REFLECT Standards, is proposed and compared to conventional LMR (based on known LINE and MATCH Standards) and other techniques (TRL, TAR). They are applied to on-wafer S-parameter measurement as well as to coaxial, waveguide and microstrip media. Experimental results up to 40 GHz are presented.